Thomas Lord Department of Mechanical Engineering and Materials Science
Professor Emeritus in the Department of Mechanical Engineering and Materials Science
Professor Tan is conducting fundamental research in materials science and processes related to electronic materials. He and his colleagues have originated the study of the subject of intrinsic gettering which is now widely used to improve yield in integrated circuit fabrications using Czochralski silicon. Primarily because of this work, the semiconductor industry granted him the SEMMY Award in the materials category in 1987. SEMMY is one of the highest awards the industry gives.
He has also studied the basic aspects of the following topics in silicon: precipitation, kinetic process of defect evolution, impurity diffusion mechanisms and point defects. These studies have led to greater understanding of the structure and properties of defects in silicon. Since 1986, his research interests have also included III-V compound semiconducting materials. He is a recipient of the 1994 Alexander Von Humboldt Prize.
- B.S. National Taiwan University (Taiwan), 1962
- M.S. Tulane University, 1965
- Ph.D. University of California - Berkeley, 1971
- Professor Emeritus in the Department of Mechanical Engineering and Materials Science
- Faculty Network Member of The Energy Initiative